Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.08a
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- Pages.157-157
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- 2007
Surface chemistry studies of the ALD process of $ZrO_2$ thin films
- Kim, Yu-Ri (Department of Chemistry Graduate School, Kyungpook National University) ;
- Kim, Chang-Min (Department of Chemistry Graduate School, Kyungpook National University)
- Published : 2007.08.15
Abstract
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