Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.08a
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- Pages.145-145
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- 2007
STM investigation on the initial dry oxidation of Si(100) at room temperature
- Hwang, Eun-Kyung (Korea Research Institute of Standards and Science) ;
- Chang, Yun-Hee (Korea Research Institute of Standards and Science) ;
- Kim, Han-Chul (Korea Research Institute of Standards and Science) ;
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Koo, Ja-Yong
(Korea Research Institute of Standards and Science)
- Published : 2007.08.15
Abstract
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