Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.08a
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- Pages.113-113
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- 2007
Mechanical properties of silicon nitride prepared by plasma enhanced chemical vapor deposition at low temperature as a function of dc bias voltage
- Pham, Thuy T.T. (Dept. of advanced materials sciences and engineering, sungkyunkwan university) ;
- Lee, J.H. (Dept. of advanced materials sciences and engineering, sungkyunkwan university) ;
- Kim, I.K. (Dept. of advanced materials sciences and engineering, sungkyunkwan university) ;
- Yeon, G.Y. (Dept. of advanced materials sciences and engineering, sungkyunkwan university)
- Published : 2007.08.15
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