한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2007년도 제33회 하계학술대회 초록집
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- Pages.81-81
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- 2007
Temporal fluctuation of electron density measured by means of Wave-Cutoff method in Radio Frequency Capacitive Coupled Plasma
- Na, Byung-Keun (Korea Advanced Institute of Science and technology) ;
- Roh, Ki-Min (Korea Advanced Institute of Science and technology) ;
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Chang, Hong-Young
(Korea Advanced Institute of Science and technology)
;
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Kim, Jung-Hyung
(Korea Research Institute of Standards and Science)
- 발행 : 2007.08.15