한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)

한국진공학회 (The Korean Vacuum Society)
권호 표지

Plasma anisotropic deposition of copper in trenches of nm scale

  • Koga, Kazunori (Graduate School of Information Science & Electrical Engineering, Kyushu University) ;
  • Shiratani, Masaharu (Graduate School of Information Science & Electrical Engineering, Kyushu University)
  • 발행 : 2007.08.15
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

키워드