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Proceedings of the Korean Vacuum Society Conference
(한국진공학회:학술대회논문집)
2007.08a
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Pages.57-57
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2007
The Korean Vacuum Society (한국진공학회)
A Trend and the Developments of Low Dielectric Constant materials for Cu Integration
Choi, Chi-Kyu
(Department of Physics, Chjeu National University)
Published : 2007.08.15
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