Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.08a
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- Pages.55-56
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- 2007
Recent Trends and Challenges in Plasma Science and Technology
- Sugai, H. (Faculty of Engineering, Chubu University, Plasma Nanotechnology Research Center, Nagoya University)
- Published : 2007.08.15
Abstract
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