한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)
- 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
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- Pages.234-237
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- 2007
질화물반도체 박막 성장용 나노 다공성 사파이어 기판 제작공정
- 발행 : 2007.06.08
초록
We fabricated nano-structures of the anodic aluminum oxides on sapphire substrates. Two processes of nano-structured sapphire surface have present: the one is the template mask and the other is the anodic oxidized aluminum deposited on sapphire substrate. The formation of nano-structures has investigated by FE-SEM measurement. The etched surface by the template showed periodic lattice but the deposited surface showed the randomly distributed phase of nanoholes instead of the periodic lattice.
키워드