Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2007.06a
- /
- Pages.234-237
- /
- 2007
질화물반도체 박막 성장용 나노 다공성 사파이어 기판 제작공정
- Published : 2007.06.08
Abstract
We fabricated nano-structures of the anodic aluminum oxides on sapphire substrates. Two processes of nano-structured sapphire surface have present: the one is the template mask and the other is the anodic oxidized aluminum deposited on sapphire substrate. The formation of nano-structures has investigated by FE-SEM measurement. The etched surface by the template showed periodic lattice but the deposited surface showed the randomly distributed phase of nanoholes instead of the periodic lattice.
Keywords