Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Analysis of the Hi-system Superconducting Thin Films Fabricated by Layer-by-Layer Deposition Method at an Ultra low growth rate

초 저속 순차증착으로 제작한 Bi계 초전도 박막의 생성막 평가

  • Yang, Seung-Ho (Dept. of Hospital Biomedical Engineering, Dongshin University) ;
  • Kim, Young-Pyo (Dept. of Electrical & Electronic Engineering, Dongshin University) ;
  • Park, Yong-Pil (Dept. of Hospital Biomedical Engineering, Dongshin University)
  • 양승호 (동신대학교 병원의료공학과) ;
  • 김영표 (동신대학교 전기전자공학과) ;
  • 박용필 (동신대학교 병원의료공학과)
  • Published : 2007.06.21
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Abstract

$Bi_2Sr_2Ca_{n-1}Cu_nO_x$(n=0, 1, 2)superconducting thin films have been fabricated by atomic layer-by-layer deposition at an ultra low growth rate using IBS(Ion Beam Sputtering) method. During the deposition, 90 mol% ozone gas of typical pressure of $1{\sim}9{\times}10^{-5}$ Torr are supplied with ultraviolet light irradiation for oxidation. XRD and RHEED investigations reveal out that a buffer layer with some different compositions is formed at the early deposition stage of less than 10 units cell and then Bi-2201 oriented along the c-axis is grown.

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