Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
- /
- Pages.373-374
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- 2007
Design and Fabrication of the $16{\times}16$ Amorphous Silicon Microbolometer Array
$16{\times}16$ 비정질 실리콘 볼로미터 설계 및 제작
-
Kang, Tai-Young
(OCAS Corp.)
;
-
Lim, Sung-Soo
(OCAS Corp.)
;
- Kwak, Yong-Seok (OCAS Corp.) ;
- Jang, Won-Soo (OCAS Corp.) ;
- Han, Myung-Soo (Korea Photonics Technology Institute) ;
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Park, Young-Sik
(Korea Photonics Technology Institute)
- Published : 2007.06.21
Abstract
The amorphous silicon microbolometer array has been developed by the MEMS design and fabrication technology. Before the bolometer array for the image sensor being designed, the structure of unit cel I and 16x16 array of it was simulated, designed and fabricated. The properties of bolometer have been measured as such that the TCR and thermal time constant can be achieved -2 %/K and 1.4 msec respectively.