Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
- /
- Pages.348-349
- /
- 2007
Fabrication of polycrystalline 3C-SiC thin film diodes
다결정 3C-SiC 박막 다이오드의 제작
- Ahn, Jeong-Hak (Univ. of Ulsan) ;
- Chung, Gwiy-Sang (Univ. of Ulsan)
- Published : 2007.06.21
Abstract
This paper describes the electrical characteristics of polycrystalline (poly) 3C-SiC thin film diodes, in which poly 3C-SiC thin films on n-type and p-type Si wafers, respectively, were deposited by APCVD using HMDS, Hz, and Ar gas at