Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
- /
- Pages.169-170
- /
- 2007
Electrical properties of $SiO_2$ thin film by OTS treatment
OTS 처리된 $SiO_2$ 박막의 전기적인 특성
- Kim, Jong-Wook (chongju Univ.) ;
- Oh, Teresa (chongju Univ.) ;
- Kim, Hong-Bae (chongju Univ.)
- Published : 2007.06.21
Abstract
기존 사용되어온 절연막인