Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Characteristics of organic light-emitting diodes with AI cathode prepared by ITS system

TTS로 성막한 Al 캐소드를 가진 유기발광소자의 특성 분석

  • Moon, Jong-Min (Dept. of Information and Nano Materials Eng. Kumoh National Institute of Technology) ;
  • Lee, Sang-Hyun (Top Engineering) ;
  • Kim, Han-Ki (Dept. of Information and Nano Materials Eng. Kumoh National Institute of Technology)
  • 문종민 (금오공과대학교 정보나노소재공학과) ;
  • 이상현 (탑엔지니어링) ;
  • 김한기 (금오공과대학교 정보나노소재공학과)
  • Published : 2007.06.21
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Abstract

We report on the characteristics of organic light-emitting diodes with Al cathode deposited by specially designed twin target sputter(TTS) system. It was found that the Al cathode films grown by TTS system were amorphous structure with nanocrystallines due to low substrate temperature during sputtering process. Effective confinement of high-density plasma between two Al targets lead to low temperature sputtering process on organic layer. Moreover, organic light-emitting diodes with Al cathode deposited by TTS system exhibited low leakage current density of $4{\times}10^{-6}\;mA/cm2$ at -6 V indicating plasma damage due to bombardment of energetic particles such as ions and $\gamma$-electrons was effectively restricted in the ITS system. Sputtering method using ITS system is expected to be applied in organic electronics and flexible displays due to its low temperature and plasma damage free deposition process.

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