한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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- Pages.286-289
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- 2007
In-line Automatic defect inspection and repair method for TFT-LCD production
- Honoki, Hideyuki (Production Engineering Research Laboratory Hitachi Ltd.) ;
- Arai, T. (Production Engineering Research Laboratory Hitachi Ltd.) ;
- Edamura, T. (Production Engineering Research Laboratory Hitachi Ltd.) ;
- Yoshimura, K. (Production Engineering Research Laboratory Hitachi Ltd.) ;
- Nakasu, N. (Production Engineering Research Laboratory Hitachi Ltd.)
- 발행 : 2007.08.27
초록
We have developed an automated circuit defect inspection and repair method that can be used to improve the yield ratio of TFT-LCD. The method focuses on correcting resist patterns after the development process to ensure shape regularity. We built a prototype system and confirmed that the method is valid.