한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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- Pages.261-264
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- 2007
Polysilicon Thin Film Transistors on spin-coated Polyimide layer for flexible electronics
- Pecora, A. (Istituto di Fotonica e Nanotecnologie (IFN)) ;
- Maiolo, L. (Istituto di Fotonica e Nanotecnologie (IFN)) ;
- Cuscuna, M. (Istituto di Fotonica e Nanotecnologie (IFN)) ;
- Simeone, D. (Istituto di Fotonica e Nanotecnologie (IFN)) ;
- Minotti, A. (Istituto di Fotonica e Nanotecnologie (IFN)) ;
- Mariucci, L. (Istituto di Fotonica e Nanotecnologie (IFN)) ;
- Fortunato, G. (Istituto di Fotonica e Nanotecnologie (IFN))
- 발행 : 2007.08.27
초록
We developed a non self-aligned poly-silicon TFTs fabrication process at two different temperatures on spin-coated polyimide layer above Si-wafer. After TFTs fabrication, the polyimide layer was mechanically released from the Si-wafer and the devices characteristics were compared. In addition self-heating and hot-carrier induced instabilities were analysed.