한국정보디스플레이학회:학술대회논문집
- 2007.08b
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- Pages.1600-1602
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- 2007
TPS Analysis of NPB organic thin film for Belt Source Evaporation in AMOLED Manufacturing
Abstract
TPS (Temperature Programmed Sublimation) technology is known to research for the plane evaporation of the organic film.[5] Using TPS technology, the plane source evaporation of NPB organic film has been studied for the first time. The NPB organic film consists of nano scale film phase and bulk phase on a substrate. The 400
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