한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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- Pages.1249-1252
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- 2007
Challenge to Future Displays: Transparent AM-OLED driven by PEALD grown ZnO TFT
- Ko Park, Sang-Hee (Transparent Electronics Team, ETRI) ;
- Hwang, Chi-Sun (Transparent Electronics Team, ETRI) ;
- Byun, Chun-Won (Transparent Electronics Team, ETRI) ;
- Ryu, Min-Ki (Transparent Electronics Team, ETRI) ;
- Lee, Jeong-Ik (Transparent Electronics Team, ETRI) ;
- Chu, Hye-Yong (Transparent Electronics Team, ETRI) ;
- Cho, Kyoung-Ik (Transparent Electronics Team, ETRI) ;
- Chae, Jang-Youl (Hanwha Living & Creative Research Center) ;
- Han, Se-Jin (Hanwha Living & Creative Research Center)
- 발행 : 2007.08.27
초록
We have fabricated 3.5” transparent AM-OLED panel driven by PEALD grown ZnO TFT. The performance of ZnO thin film transistor was improved by adapting top gate structure, protection layer for ZnO from photolithography process, optimizing temperature and plasma power of ZnO growth process. The ZnO-TFT has a mobility of