Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 2007.02a
- /
- Pages.17-18
- /
- 2007
In-situ inspection of thin-film layers on patterned structures by dispersive white-light interferometry
분산 백색광 간섭계를 이용한 실시간 박막두께형상측정
Abstract
Keywords