한국광학회:학술대회논문집 (Proceedings of the Optical Society of Korea Conference)
- 한국광학회 2007년도 하계학술발표회 논문집
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- Pages.187-188
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- 2007
ZERODUR의 저손실거울의 산란에 대한 연구
A study on scattering in low loss mirror with superpolished ZERODUR
- 발행 : 2007.07.01
초록
Four kinds of mirror substrates with same surface roughness were fabricated. On those substrates, a dielectric multi-layer coating with high reflectivity was deposited by ion beam sputtering technique. Most of the fused silica mirrors showed lower scattering than the ZERODUR mirrors one, which deposited on substrates similar in surface roughness. The ZERODUR mirrors scattering strongly depend on the micro-structure of
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