The Qualitative Prediction for diffusion and transition of contaminants in the Clean Room by Numerical Flow Analysis

기류해석을 이용한 클린룸 내 오염물질의 확산경로 예측

In this study, the qualitative prediction and evaluation of clean room being utilized for mass production of electrronic components have been performed with the help of flow simulation. Compared to the experimental analysis based on measurements of the number of particles, concentration of contaminants and flow characteristics, the numerical analysis used in this study is much cost-effective.