Preparation of Boron Carbide Thin Films by DC Magnetron Reactive Sputtering

  • Lee, K.E. (Department of Material science & engineering, Chungnam National University) ;
  • Kim, C.H. (ReCAMM, Chungnam National University) ;
  • Kim, C.O. (Department of Material science & engineering, Chungnam National University)
  • 발행 : 2007.05.28