Proceedings of the Korean Magnestics Society Conference (한국자기학회:학술대회 개요집)
- 2007.05a
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- Pages.132.2-132.2
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- 2007
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- 2233-9485(pISSN)
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- 2233-9574(eISSN)
The Effect on Electrical Property of Etched Magnetic Tunnel Junction Stack in $Cl_{2}/Ar\;and\;HBr/Ar\;plasma$
- Min, Su-Ryun (Department of Chemical Engineering, INHA University) ;
- Cho, Han-Na (Department of Chemical Engineering, INHA University) ;
- Choi, Seung-Pil (Department of Chemical Engineering, INHA University) ;
- Hwang, In-Jun (Semiconductor Device and Material Lab., Samsung Advanced Institute of Technology) ;
- Kim, Kee-Won (Semiconductor Device and Material Lab., Samsung Advanced Institute of Technology) ;
- Chung, Chee-Won (Department of Chemical Engineering, INHA University)
- Published : 2007.05.28
Abstract
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