Proceedings of the Korean Magnestics Society Conference (한국자기학회:학술대회 개요집)

  • 2007.05a
  • /
  • Pages.24.2-24.2
  • /
  • 2007
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  • 2233-9485(pISSN)
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  • 2233-9574(eISSN)
The Korean Magnetics Society (한국자기학회)
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Etch Characteristics of Magnetic Tunnel Junction Stack Using a High Density Plasma in a HBr/Ar Gas

  • Min, Su-Ryun (Department of Chemical Engineering, INHA University) ;
  • Choi, Han-Na (Department of Chemical Engineering, INHA University) ;
  • Choi, Seung-Pil (Department of Chemical Engineering, INHA University) ;
  • Kim, Jung-Seung (Nano-device Research Center, Korea Institute of Science and Technology) ;
  • Shin, Kyung-Ho (Nano-device Research Center, Korea Institute of Science and Technology) ;
  • Chung, Chee-Won (Department of Chemical Engineering, INHA University)
  • Published : 2007.05.28
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Abstract

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