대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2007년도 춘계학술대회A
- /
- Pages.1459-1462
- /
- 2007
열전박막을 이용한 마이크로 냉각소자 제작
Fabrication of a Micro Cooler using Thermoelectric Thin Film
초록
In general a thermoelectric cooler (TEC) consists of a series of P type and N type thermoelectric materials sandwiched between two wafers. When a DC current passes through these materials, three different effects take place; Peltier effect, Joule heating effect and heat transfer by conduction due to temperature difference between hot and cold plates. In this study we have developed a micro TEC using