0.4nm 해상도의 엔코더 타입 전기용량형 변위센서

An 0.4nm Resolution Encoder-like Capacitive Displacement Sensor

A Contact-type Linear Encoder-like Capacitive Displacement Sensor (CLECDiS) has been developed to measure displacements at high accuracy within a long measurement range. In this paper, we have worked on improving the performance and reliability of the sensor. The performance increase can be done by introducing the smaller electrode patterns of $4{\mu}m$ width. In order to improve the reliability of the sensor we have changed the electrode layers from chrome-gold to chrome-gold-chrome and re-design its supporting structure. The newly-designed sensor is fabricated and tested to show that its sensitivity is $35pF/{\mu}m$, which implies that its resolution may be 0.36nm if SNR (Signal-to-Noise-Ratio) is 80.1dB. It is about ten times of that $(3.14pF/{\mu}m)$ of its previous version with 10${\mu}m$ electrodes. The total measurement range remains the same as the previous one; 15mm. The calibration experiments show its improved performance and reliability.