Manufacture and Performance Estimation of Electron Detector for SEM

SEM용 전자검출기의 제작 및 성능평가

The nature of the signal collected by an SEM(Scanning Electron Microscope) in order to form images are all dependent on the detector used to collect them, and the quality of an acquired images is strongly influenced by detector performance. Therefore, the development of detector with high performance is very important for improving on the resolution of SEM. This paper presents the manufacture of secondary electron detector and the optimal position of electron detector through numerical analysis in SEM.