대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2007년도 춘계학술대회B
- /
- Pages.3413-3417
- /
- 2007
반도체 클린룸용 에어와셔 시스템의 성능개선을 위한 연구
A Study on the Performance Improvement of the Air Washer System for Semiconductor Manufacturing Clean Rooms
- 발행 : 2007.05.30
초록
In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as