Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2007.05b
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- Pages.2725-2730
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- 2007
The Measurement of Vacuum Pressure for the Rotors of Disk-type Molecular drag Pumps
원판형 분자 드래그펌프 회전자에 대한 압력 측정
- Published : 2007.05.30
Abstract
Turbo-type molecular drag pumps ( MDPs ) are used in the liquid crystal display ( LCD ), semiconductor and other thin film industries. Siegbahn ( disk-type ) molecular drag pumps are used as high-pressure stages in the hybrid-type turbomolecular pumps, where they can operate in the viscous, the transition and the free molecular flow regime. In this study is performed to investigate the pumping characteristics of three-stage disk-type molecular drag pump ( DTDP ) in the molecular transition flow region. The experiments are measured using five vacuum pressure gauges in the positions for rotors of DTDP. The test is performed with nitrogen gas (
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