Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2007.05b
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- Pages.2702-2707
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- 2007
Numerical Simulation for Generation of Homogeneous Thin-Film in Spray Deposition
분무증착에서 균일 박막형성을 위한 전산모사
Abstract
The purpose of this study is to calculate the behavior of molecules for the generation of homogeneous thin-films in the process of spray deposition. The calculation system was composed of a suface molecular region and droplet molecular region. The thin-film was generated when droplet molecules fell to surface molecules. Lennard-Jones potential had been used as intermolecular potential, and only attraction 때 d repulsion had been used for the behavior of the droplet on the solid surface. As results, the behavior of the droplet was so much influenced by the surface temperature in the spray deposition process. High temperature of surface has higher porosity and larger spread area. It was found that simulation results generally agreed well with previous the experimental results. This simulation result will be the foundation for the deposition processes of industry.