대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2007년도 춘계학술대회B
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- Pages.2182-2187
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- 2007
박막 실리콘 내 도핑 농도 변화에 따른 포논과 전자의 열전도율 기여도에 대한 수치해석
Predictions of Phonon and Electron Contributions to Thermal Conductivity in Silicon Films with Varying Doping Density
초록
The relative contributions of phonon and electron to the thermal conductivity of silicon film with varying doping density are evaluated from the modified electron-phonon interaction model, which is applicable to the micro/nanoscale simulation of energy transport between energy carriers. The thermal conductivities of intrinsic silicon layer thicknesses from 20 nm to 500 nm are calculated and extended to the variation in n-type doping densities from 1.0
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