Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2007.06a
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- Pages.161-162
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- 2007
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- 2005-8446(pISSN)
Development of a Vacuum-Compatible Rotation Table for Fine Pattern Machining using Electron beams
전자빔 미세패턴 가공을 위한 진공용 회전테이블 개발
- Khim, G. ;
- Park, C.H. ;
- Song, C.K. ;
- Lee, H.
- Published : 2007.06.20