Direct Deposition of Polycrystalline Silicon Films on Plastic Substrates by Catalytic CVD for Thin Film Transistors

• Cho, Chul-Lae (Dept. of Electronics Engineering, Sejong University) ;
• Kim, Tae-Hwan (Dept. of Nano Science and Technology, University of Seoul) ;
• Lee, Kyung-Min (Dept. of Nano Science and Technology, University of Seoul) ;
• Hong, Wan-Shick (Dept. of Nano Science and Technology, University of Seoul)

• Published : 2007.02.06

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