한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2007년도 제32회 학술대회 초록집
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- Pages.131-131
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- 2007
Study on Application Tests of MEMS and Nano-devices using SiC Thin Films and Nano-wires Grown by MOCVD
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Nam, S.H.
(Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Hyun, J.S. (Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
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Boo, J.H.
(Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- 발행 : 2007.02.06