Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.02a
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- Pages.123-123
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- 2007
Chemical Bonding Structures of Low-k SiOCH films with HMDSO and $O_2$ precursors deposited by PECVD
- Kim, Seung-Hyun (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University) ;
- Navamathavan, R. (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University) ;
- Kim, Doo-Chul (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University) ;
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Lee, Kwang-Man
(Faculty of Electrical and Electronic Engineering, Cheju National University)
;
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Choi, Chi-Kyu
(Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University)
- Published : 2007.02.06
Abstract
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