한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2007년도 제32회 학술대회 초록집
- /
- Pages.84-84
- /
- 2007
The Study of Mechanism of Thermal Decomposition of Dimethylisopropylsilane on Si (100) Surface
- Jee, Hae-Geun (Dept. of Chemistry, Sunkyunkwan University Center for Nanotubes and Nanostructured Composites (CNNC)) ;
- Kim, Seong-Kyu (Dept. of Chemistry, Sunkyunkwan University Center for Nanotubes and Nanostructured Composites (CNNC)) ;
- Lee, Soon-Bo (Dept. of Chemistry, Sunkyunkwan University Center for Nanotubes and Nanostructured Composites (CNNC))
- 발행 : 2007.02.06