Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Scanning large area with a micro-electron column

마이크로 전자칼럼을 이용한 대면적 스캔

  • Published : 2007.11.01
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Abstract

In large area scanning with a micro-electron column, the optimal operation condition for the best visibility was studied. A micro-electron column can realize nearly unlimited scanning size with distribution of micro-electron columns, therefore applicable to large sized SEM or VSEM. The maximum scanning size with a micro-electron column was about $200cm^2$ when only one deflector was employed. However, a double deflector equipped micro-electron column provided 1.7 times larger scanning area with the same visibility as that of one deflector.

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