한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 추계학술대회 논문집
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- Pages.175-176
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- 2007
다결정 3C-SiC 완충층위에 마이크로 센서용 Pd 박막 증착
Depositions of Pd thin films on poly-crystalline 3C-SiC buffer layers for microsensors
- Ahn, Jeong-Hak (University of Ulsan) ;
- Chung, Jae-Min (University of Ulsan) ;
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Chung, Gwiy-Sang
(University of Ulsan)
- 발행 : 2007.11.01
초록
This paper describes on the characteristics of Pd thin films deposited on poly-crystalline 3C-SiC buffer layers for microsensors, in which the poly 3C-SiC was grown on Si,