대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2007년도 제38회 하계학술대회
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- Pages.1528-1529
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- 2007
초소형 질량 분석기를 위한 열전자 방출원 제작
Fabrication of a thermoelectron emitter for a micro mass spectrometer
- Song, S.H. (Division of Electrical & Computer Engineering, AJOU University) ;
- Yoon, H.J. (Division of Electrical & Computer Engineering, AJOU University) ;
- Hong, Nguyen Tuan (Department of Physics, AJOU University) ;
- Lee, S.I. (Department of Physics, AJOU University) ;
- Yang, S.S. (Division of Electrical & Computer Engineering, AJOU University)
- 발행 : 2007.07.18
초록
In this paper, we present the fabrication of a thermoelectron emitter for a micro mass spectrometer. The micro mass spectrometer consists of a silicon substrate with a thermoelecton emitter and glass substrate with an acceleration electrode and a repeller electrode. The hot-filament is fabricated by electroplating. We designed two shapes of thermoelectron emitter and compared the emission current.
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