Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2007.07a
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- Pages.242-243
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- 2007
Characterization of Al:ZnO thin films deposited at different substrate temperatures
기판 온도변화에 따른 Al-ZnO 박막의 특성
- No, I.J. (INHA Univ.) ;
- Shin, P.K. (INHA Univ.) ;
- Lee, C. (INHA Univ.) ;
- Kim, Y.H. (Kyungwon Univ.) ;
- Ji, S.H. (Kyungwon Univ.) ;
- Lim, Y.C. (Osan Coll) ;
- Chung, M.Y. (SEWON SI)
- Published : 2007.07.18
Abstract
Highly transparent conducting aluminum-doped zinc oxide (AZO) thin films were deposited on Corning glass substrate using an Nd:YAG pulsed laser deposition technology. AZO thin films deposited with 650nm thickness showed the best electrical properties of the electrical resistivity of
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