Nonlinear Modeling of Dynamic AFM Using Proper Orthogonal Modes

적합직교모드를 이용한 동적모드 AFM 의 비선형 모델링

The proper orthogonal decomposition(POD) is used to the modal analysis of microcantilever of dynamic mode atomic force microscopy(AFM). The proper orthogonal modes(POM) are extracted from vibrating signals of microcantilever when it resonates and taps the sample. The POMs resemble the linear normal modes(LNM) of cantilever vibrating at each resonance frequency. Some of POMs in tapping microcantilever show quite different shapes from the POMs of the resonating microcantilever. Also this POMs can be applied to model for the complex nonlinear behavior of the dynamic mode AFM microcantilevers.