Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Direct measurement technique of the oscillation amplitude of a quartz tuning fork in atomic force microscopy

AFM용 수정진동자 진동폭의 직접 측정 기술

  • Kim, Jeong-Hoi (Department of Electronics and Electrical Engineering Pohang University of Science and Technology) ;
  • Han, Hae-Wook (Department of Electronics and Electrical Engineering Pohang University of Science and Technology)
  • 김정회 (포항공과대학교 전자전기공학과) ;
  • 한해욱 (포항공과대학교 전자전기공학과)
  • Published : 2006.06.21
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Abstract

The oscillation amplitude of a probe tip is an important parameter to determine the resolution of atomic force microscopy (AFM) techniques. In this work, we introduce a new method for the measurement of the oscillation amplitude of a quartz tuning fork tip sub-nanometer resolution.

Keywords