Luminescence Properties of Nanostructured Zn-Si-O Composite Films Deposited by RF Sputtering

  • Kim Y.H. (Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology) ;
  • Jung S.M. (Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology) ;
  • Cho W.J. (Nano Device Research Center, Korea Institute of Science and Technology)
  • 발행 : 2006.08.01