Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2006.08a
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- Pages.197-197
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- 2006
Luminescence Properties of Nanostructured Zn-Si-O Composite Films Deposited by RF Sputtering
- Kim Y.H. (Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology) ;
- Jung S.M. (Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology) ;
- Cho W.J. (Nano Device Research Center, Korea Institute of Science and Technology)
- Published : 2006.08.01
Abstract
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