Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2006.08a
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- Pages.171-171
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- 2006
Hybrid-Polymer Thin Films by PECVDMethod and Characterization of Their Electrical and Mechanical Properties
- Bae I.S. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Cho S.J. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Boo J.H. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- Published : 2006.08.01
Abstract
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