Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2006.02a
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- Pages.211-211
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- 2006
1:1 Electron-beam Emission Lithography: a method for MIM e-beam projection
- Choi Kwang-Nam (Department of Electronic Engineering KyungHee University) ;
- Kwak Sung-Kwan (Department of Electronic Engineering KyungHee University) ;
- Chung Kwan-Soo (Department of Electronics, Materials Research Center for Information Display, KyungHee University) ;
- Kim Dong-Sik (Department of Computer System and Engineering InHa Technical College)
- Published : 2006.02.01
Abstract
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