Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2006.04a
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- Pages.124-124
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- 2006
Annealing effect on residual stress in ZnO films produced by R.F. sputtering
R.F.sputtering으로 제조된 ZnO박막의 응력거동에 미치는 Annealing의 영향
- Published : 2006.04.01
Abstract
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