Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2006.10a
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- Pages.77-77
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- 2006
Study on profile improvement for sub-65 nm shallow trench isolation (STI) gap filling
65 nm이하 shallow trench isolation (STI) gap-fill 특성향상을 위한 profile 개선 연구
- Published : 2006.10.19
Abstract
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