Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2006.10a
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- Pages.33-34
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- 2006
Preparation and Characterization of Al-doped ZnO Films Deposited by Reactive Co-sputtering
반응성 스퍼터링법으로 증착한 AZO박막의 제조 및 특성평가
- Published : 2006.10.19
Abstract
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