Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2006.05a
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- Pages.198-201
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- 2006
플라스마 디스플레이 패널의 격벽 형성의 에칭 메커니즘
- Published : 2006.05.01
Abstract
To produce fine structure with uniform surface of barrier ribs in PDP, acid etching process has been used in manufacture process. It is necessary to understand the mechanism of etching, particularly on the interface of ceramic fillers and matrix glass. We investigated the effect of ceramic fillers (ZnO,
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